3D X-ray Microscopes
Sigray’s 3D X-ray Microscope product family offers the most unique and innovative features on the market. Our turnkey microscopes offer a simple and intuitive experience for beginners while maintaining comprehensive access for power users.
We’re vertically integrated across X-ray source, optics and detector which means we can bring you unique advances available nowhere else.
We produce systems that span spatial resolutions from nanometers to millimeters to provide outstanding flexibility for a wide range of research application interests, including materials science, life science, semiconductor, additive manufacturing and pharmaceuticals.

Apex XCT-150 | High throughput sub-micron 3D x-ray microscope capable of complete 3D acquisitions on the order of minutes. Designed for semiconductor, biological stained tissues, and battery applications.

PrismaXRM-810 | Flagship sub-micron 3D X-ray microscope featuring best in class versatility, resolution and throughput.
Available upgrade to Talbot-Lau interferometry offers exclusive contrast modes: Quantitative Phase and Sub-resolution Darkfield
Specification | TriLambdaXRM-30 | PrismaXRM-810 | ChromaXRM-500 |
---|---|---|---|
Goal | Highest laboratory spatial resolution XRM at 35 nm | Flagship XRM offering largest voltage range and 0.5 µm spatial resolution | Revolutionary X-ray source offers multiple quasi-monochromatic X-ray beams |
Dimensions [m] | 2.3 L x 1.3 W x 1.5 H | 2.2 L x 1.2 W x 2.3 H | 1.0 L x 0.8 W x 0.6 H |
Weight [kg] | 2175 | 2730 | 150 |
Source | 20 to 50 kV 100W Sealed Reflection 3 target materials | 30 to 160 kV 25W Sealed Transmission 200 um min FOD | 20 to 60 kV 100W Sealed Reflection Up to 5 target materials |
Detector | 4MP Deep Cooled CCD 4MP Direct Detection CCD | 4MP Deep Cooled CCD 7MP Flat Panel (optional) | 4MP Deep Cooled CCD Up to 5 objectives 7MP Flat Panel (optional) |
Resolution | 35 nm | 0.5 µm | 0.5 µm |
Sample Size (diameter x height) | 50 x 50 um | 300 x 500 mm | 50 x 50 mm |
Sample Weight | 150 g | 25 kg | 500 g |
Sample Handling Robot | No | Optional Up to 20 samples | Optional Up to 10 samples |