3D X-ray Microscopes
Sigray produces systems that span spatial resolutions from nanometers to millimeters to provide outstanding flexibility for a wide range of research application interests, including materials science, life science, semiconductor, additive manufacturing and pharmaceuticals.
TriLambda-30 | Highest resolution system on the market. Enables up to three different energies within the same system, including biological (1.7 keV), mid Z (5.4 keV), and hard x-rays (8 keV)
EclipseXRM-900 | Flagship sub-micron 3D X-ray microscope featuring best in class resolution and throughput.
Apex XCT-150 | High throughput sub-micron 3D x-ray microscope capable of complete 3D acquisitions on the order of minutes. Designed for semiconductor, biological stained tissues, and battery applications.
| Specification | TriLambdaXRM-30 | PrismaXRM-810 | Apex XCT-150 |
|---|---|---|---|
| Goal | Highest laboratory spatial resolution XRM at 35 nm | Highest resolution system with <0.3 µm spatial resolution | Highest throughput system with 0.5 µm spatial resolution. Designed for flat (semi and pouch battery) samples. |
| Dimensions [m] | 2.3 L x 1.3 W x 1.5 H | 2.6 L x 1.4 W x 2.2 H | 2.2 L x 1.2 W x 2.3 H |
| Weight [kg] | 2175 | 3523 | 2990 |
| Resolution | 35 nm | 0.3 µm | 0.5 µm |
| Sample Size (diameter x height) | 50 x 50 um | 300 x 500 mm | 300mm wafers |
| Sample Weight | 150 g | 25 kg | 500 g |
| Sample Handling Robot | No | Optional Up to 20 samples (depends on sample size) | Optional Up to 10 samples (depends on sample size) |